KXTJ3 Tri-axis Digital Accelerometer

ROHM Semiconductor KXTJ3 Tri-axis Digital Accelerometer is offered as a tri-axis ±2g, ±4g, ±8g, or ±16g silicon accelerometer. KXTJ3's sensing element is constructed using ROHM Semiconductor’s proprietary plasma micromachining process technology. Acceleration sensing is based on differential capacitance arising from the acceleration-induced motion of the sensing element. This further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. KXTJ3's sensing element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sensing element provides signal conditioning and digital communications.